Microelectromechanical system for measuring angular rate | Patent Number 06508122

US 06508122 B1
Application Number9662438
Publication Number-
Pendency2 years, 4 months, 8 days
Filled DateSep 15, 2000
Priority DateSep 16, 1999
Publication Date-
Expiration DateSep 16, 2019
Inventor/ApplicantsChing-Fang Lin
Hiram McCall
ExaminesKWOK, HELEN C
Art Unit2856
Technology Center2800
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