Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Patent Number 06546508

US 06546508 B1
Application Number9430476
Publication Number-
Pendency3 years, 5 months, 12 days
Filled DateOct 29, 1999
Priority DateOct 29, 1999
Publication Date-
Expiration DateOct 29, 2019
Inventor/ApplicantsQingsu Wang
Elfido Coss, Jr.
Thomas Sonderman
ExaminesDUNCAN, MARC M
Art Unit2184
Technology Center2100
Assignments
Advanced Micro Devices Inc
Current
Advanced Micro Devices Inc
Original
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