Fabrication method and fabrication apparatus for thin film transistor | Patent Number 06579749
US 06579749 B2Filled DateNov 15, 1999
Priority DateNov 15, 1999
Publication DateJan 24, 2002
Expiration DateNov 15, 2019
Inventor/ApplicantsKazushige Takechi
KAZUSHIGE TAKECHI
KAZUSHIGE TAKECHI
ExaminesMENZ, LAURA MARY
Art Unit2813
Technology Center2800
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