Metal stack for local interconnect layer | Patent Number 06774033
US 06774033 B1Filled DateNov 4, 2002
Priority DateNov 4, 2002
Publication Date-
Expiration DateNov 4, 2022
Inventor/ApplicantsMira Ben-Tzur
Gorley L. Lau
Krishnaswamy Ramkumar
Dafna Beery
Gorley L. Lau
Krishnaswamy Ramkumar
Dafna Beery
ExaminesSMITH, BRADLEY
Art Unit2824
Technology Center2800
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