Method of growing a thin film onto a substrate | Patent Number 07018478

US 07018478 B2

Application Number10893027

Publication NumberUS 20040261706 A1

Pendency1 year, 8 months, 15 days

Filled DateJul 16, 2004

Priority DateApr 16, 2001

Publication DateDec 30, 2004

Expiration DateApr 16, 2021

Inventor/ApplicantsSven Lindfors
Pekka T. Soininen
Pekka T. Soininen
Sven Lindfors

ExaminesKUNEMUND, ROBERT M

Art Unit1722

Technology Center1700

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