Interconnect structure and method for semiconductor device | Patent Number 07768134
US 07768134 B2Filled DateFeb 10, 2009
Priority DateFeb 17, 2006
Publication DateJun 11, 2009
Expiration DateFeb 16, 2026
Inventor/ApplicantsTadashi Iijima
Yoshiaki Shimooka
Yoshiaki Shimooka
ExaminesHOANG, QUOC DINH
Art Unit2892
Technology Center2800
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