Apparatus for fabrication of thin films | Patent Number 07833352

US 07833352 B2
Application Number10383291
Publication NumberUS 20030150385 A1
Pendency7 years, 8 months, 17 days
Filled DateMar 6, 2003
Priority DateMay 10, 2000
Publication DateAug 14, 2003
Expiration DateNov 16, 2022
Inventor/ApplicantsLeif Keto
Janne Kesälä
Janne Kesala
Leif Keto
Niklas Bondestam
Pekka T. Soininen
Niklas Bondestam
Pekka T. Soininen
ExaminesKACKAR, RAM N
Art Unit1716
Technology Center1700
Assignments
Asm International
Current
Asm International
Original
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