Maskless inter-well deep trench isolation structure and methods of manufacture | Patent Number 08536018

US 08536018 B1
Application Number13467314
Publication Number-
Pendency1 year, 4 months, 11 days
Filled DateMay 9, 2012
Priority DateMay 9, 2012
Publication Date-
Expiration DateSep 17, 2021
Inventor/ApplicantsBrent A. Anderson
Ryoji Hasumi
Edward J. Nowak
Mickey H. Yu
Josephine B. Chang
Andres Bryant
Michael A. Guillorn
ExaminesPATTON, PAUL E
Art Unit2822
Technology Center2800
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Toshiba America Electronic Components
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Toshiba America Electronic ComponentsToshiba
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International Business Machines
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