Interconnect structure employing a Mn-group VIIIB alloy liner | Patent Number 08772942

US 08772942 B2
Application Number12693637
Publication NumberUS 20110180309 A1
Pendency4 years, 5 months, 14 days
Filled DateJan 26, 2010
Priority DateJan 26, 2010
Publication DateJul 28, 2011
Expiration DateJul 8, 2018
Inventor/ApplicantsKazumichi Tsumura
Takeshi Nogami
Takamasa Usui
Daniel C. Edelstein
ExaminesULLAH, ELIAS
Art Unit2893
Technology Center2800
Assignments
Toshiba America Electronic Components
Current
Toshiba America Electronic ComponentsToshiba
Original
International Business Machines
Original
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