Three-mass coupled oscillation technique for mechanically robust micromachined gyroscopes | Patent Number 08955381

US 08955381 B2
Application Number13613770
Publication NumberUS 20130061673 A1
Pendency2 years, 5 months, 7 days
Filled DateSep 13, 2012
Priority DateSep 13, 2011
Publication DateMar 14, 2013
Expiration DateSep 12, 2031
Inventor/ApplicantsMehmet Akif Erismis
ExaminesCHAPMAN JR, JOHN E
Art Unit2855
Technology Center2800
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Imec VzwImec
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