Pellicles with reduced particulates | Patent Number 08968971

US 08968971 B2
Application Number13789894
Publication NumberUS 20140255827 A1
Pendency1 year, 12 months
Filled DateMar 8, 2013
Priority DateMar 8, 2013
Publication DateSep 11, 2014
Expiration DateMar 7, 2033
Inventor/ApplicantsChing-Bore Wang
ExaminesROSASCO, STEPHEN D
Art Unit1721
Technology Center1700
Assignments
Micro Lithography Inc.
Current
Micro Lithography Inc.
Original
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