Optical device, and laser chamber and gas laser apparatus using the same | Patent Number 09093814

US 09093814 B2
Application Number14220956
Publication NumberUS 20140286366 A1
Pendency1 year, 4 months, 10 days
Filled DateMar 20, 2014
Priority DateMar 20, 2014
Publication DateSep 25, 2014
Expiration DateMar 19, 2034
Inventor/ApplicantsMasanori Yashiro
Takahito Kumazaki
Kouji Kakizaki
ExaminesVU, VU A
Art Unit2828
Technology Center2800
Assignments
Gigaphoton Inc.
Current
Gigaphoton Inc.
Original
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