Parallel batch chemical vapor deposition system | Patent Number 09169562

US 09169562 B2
Application Number13469515
Publication NumberUS 20120219713 A1
Pendency3 years, 5 months, 19 days
Filled DateMay 11, 2012
Priority DateMay 25, 2010
Publication DateAug 30, 2012
Expiration DateOct 27, 2023
Inventor/ApplicantsDarren M. Simonelli
Piero Sferlazzo
ExaminesBENNETT, CHARLEE
Art Unit1718
Technology Center1700
Assignments
Aventis Holdings Inc. Sanofi
Current
Aventis Holdings Inc. SanofiSanofi
Original
Singulus Mocvd Gmbh I.gr.
Original
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