Micro-mirror arrays | Patent Number 09217861

US 09217861 B2
Application Number14373071
Publication NumberUS 20140368920 A1
Pendency2 years, 11 months, 8 days
Filled DateJan 18, 2013
Priority DateJan 18, 2013
Publication DateDec 18, 2014
Expiration DateJan 17, 2033
Inventor/ApplicantsXavier Rottenberg
Veronique Rochus
Murali Jayapala
Geert Van der Plas
Simone Severi
ExaminesBEN, LOHA
Art Unit2872
Technology Center2800
Assignments
Imec Vzw
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