Excimer laser apparatus and excimer laser system | Patent Number 09425576

US 09425576 B2
Application Number14487796
Publication NumberUS 20150003485 A1
Pendency1 year, 11 months, 12 days
Filled DateSep 16, 2014
Priority DateOct 22, 2012
Publication DateJan 1, 2015
Expiration DateOct 21, 2032
Inventor/ApplicantsOsamu Wakabayashi
Takeshi Ohta
Tooru Abe
Hiroaki Tsushima
ExaminesPARK, KINAM
Art Unit2828
Technology Center2800
Assignments
Gigaphoton Inc.
Current
Gigaphoton Inc.
Original
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