Back-end processing using low-moisture content oxide cap layer | Patent Number 09431455

US 09431455 B2
Application Number14536649
Publication NumberUS 20160133666 A1
Pendency1 year, 9 months, 25 days
Filled DateNov 9, 2014
Priority DateNov 9, 2014
Publication DateMay 12, 2016
Expiration DateNov 8, 2034
Inventor/ApplicantsYakov Roizin
Amos Fenigstein
Avi Strum
ExaminesMEHTA, RATISHA
Art Unit2895
Technology Center2800
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