Nucleation of aluminum nitride on a silicon substrate using an ammonia preflow | Patent Number 09617656

US 09617656 B2
Application Number14325195
Publication NumberUS 20140318443 A1
Pendency2 years, 9 months, 9 days
Filled DateJul 7, 2014
Priority DateJul 25, 2011
Publication DateOct 30, 2014
Expiration DateJul 24, 2031
Inventor/ApplicantsWilliam E. Fenwick
Jeff Ramer
ExaminesCHEN, BRET P
Art Unit1715
Technology Center1700
Assignments
Samsung Electronics
Current
Manutius Ip Inc.
Original
Toshiba
Original
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