Showerhead apparatus for a linear batch chemical vapor deposition system | Patent Number 09869021

US 09869021 B2
Application Number13900028
Publication NumberUS 20130270362 A1
Pendency4 years, 8 months
Filled DateMay 22, 2013
Priority DateMay 25, 2010
Publication DateOct 17, 2013
Expiration DateJan 16, 2022
Inventor/ApplicantsRobert P. Couilliard
Paul Thomas Fabiano
Matthew C. Farrell
Piero Sferlazzo
Dennis R. Stucky
Darren M. Simonelli
ExaminesBENNETT, CHARLEE
Art Unit1718
Technology Center1700
Assignments
Aventis Holdings Inc. Sanofi
Current
Aventis Holdings Inc. SanofiSanofi
Original
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