Methods of error detection in fabrication processes | Patent Number 10241502

US 10241502 B2
Application Number15374453
Publication NumberUS 20170097635 A1
Pendency2 years, 3 months, 17 days
Filled DateDec 9, 2016
Priority DateOct 1, 2015
Publication DateApr 6, 2017
Expiration DateSep 30, 2035
Inventor/ApplicantsJames Broc Stirton
Eugene Barash
Richard Good
ExaminesSANDVIK, BENJAMIN P
Art Unit2826
Technology Center2800
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