Angular control of ion beam for vertical surface treatment | Patent Number 10535522

US 10535522 B1
Application Number16107275
Publication Number-
Pendency1 year, 4 months, 26 days
Filled DateAug 21, 2018
Priority DateAug 21, 2018
Publication Date-
Expiration DateAug 20, 2038
Inventor/ApplicantsShurong Liang
Glen Gilchrist
Gang Shu
ExaminesABDELAZIEZ, YASSER A
Art Unit2898
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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