AVD hardmask for damascene patterning | Patent Number 10593626

US 10593626 B2
Application Number15723083
Publication NumberUS 20180122744 A1
Pendency2 years, 5 months, 17 days
Filled DateOct 2, 2017
Priority DateDec 29, 2011
Publication DateMay 3, 2018
Expiration DateDec 28, 2031
Inventor/ApplicantsMichael A. Childs
Kevin J. FISCHER
Ruth A. BRAIN
Kevin J. Fischer
Ruth A. Brain
Michael A. CHILDS
ExaminesHARRISTON, WILLIAM A
Art Unit2899
Technology Center2800
Assignments
Daedalus Prime Llc
Current
Intel Corporation
Original
Law Firm
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