Organotin oxide hydroxide patterning compositions, precursors, and patterning | Patent Number 10732505
US 10732505 B1Filled DateApr 29, 2020
Priority DateOct 13, 2015
Publication DateAug 13, 2020
Expiration DateOct 12, 2035
Inventor/ApplicantsStephen T. Meyers
Jeremy T. Anderson
Alan J. Telecky
Douglas A. Keszler
Joseph B. Edson
Kai Jiang
Brian J. Cardineau
Jeremy T. Anderson
Alan J. Telecky
Douglas A. Keszler
Joseph B. Edson
Kai Jiang
Brian J. Cardineau
ExaminesCHU, JOHN S Y
Art Unit1737
Technology Center1700
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