Techniques for controlling precursors in chemical deposition processes | Patent Number 10822699

US 10822699 B2
Application Number15946483
Publication NumberUS 20190203358 A1
Pendency2 years, 7 months, 3 days
Filled DateApr 5, 2018
Priority DateDec 29, 2017
Publication DateJul 4, 2019
Expiration DateDec 28, 2037
Inventor/ApplicantsElaina Babayan
Vijay Venugopal
Sarah White
Jonathan Bakke
ExaminesZERVIGON, RUDY
Art Unit1716
Technology Center1700
Assignments
Varian Medical Systems Inc.
Current
Applied Materials IsraelApplied Materials Inc.
Original
Varian Medical Systems Inc.
Original
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