Structure and method of forming fin device having improved fin liner | Patent Number 10971403

US 10971403 B2
Application Number16714059
Publication NumberUS 20200135573 A1
Pendency1 year, 3 months, 25 days
Filled DateDec 13, 2019
Priority DateMar 28, 2018
Publication DateApr 30, 2020
Expiration DateMar 27, 2038
Inventor/ApplicantsMin Gyu Sung
Sony Varghese
Jae Young Lee
Johannes Van Meer
Naushad K. Variam
ExaminesNGUYEN, DAO H
Art Unit2818
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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