In-situ plasma cleaning of process chamber components | Patent Number 11037758

US 11037758 B2
Application Number16724944
Publication NumberUS 20200126757 A1
Pendency1 year, 5 months, 25 days
Filled DateDec 23, 2019
Priority DateJun 12, 2015
Publication DateApr 23, 2020
Expiration DateJun 11, 2035
Inventor/ApplicantsPeter Kurunczi
Ryan Downey
Jay T. Scheuer
William M. Holber
Kevin Anglin
Alexandre Likhanskii
William Davis Lee
ExaminesOLSEN, ALLAN W
Art Unit1716
Technology Center1700
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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