Extraction apparatus and system for high throughput ion beam processing | Patent Number 11127556

US 11127556 B2
Application Number16578847
Publication NumberUS 20200098540 A1
Pendency1 year, 12 months, 4 days
Filled DateSep 23, 2019
Priority DateSep 21, 2018
Publication DateMar 26, 2020
Expiration DateSep 20, 2038
Inventor/ApplicantsCostel Biloiu
Jon Ballou
James P. Buonodono
ExaminesNGUYEN, KIET TUAN
Art Unit2881
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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