Foam in ion implantation system | Patent Number 11222768
US 11222768 B2Filled DateAug 26, 2019
Priority DateSep 7, 2018
Publication DateMar 12, 2020
Expiration DateSep 6, 2038
Inventor/ApplicantsEric D. Hermanson
Thomas Stacy
Lyudmila Stone
Philip Layne
James Alan Pixley
Thomas Stacy
Lyudmila Stone
Philip Layne
James Alan Pixley
ExaminesOSENBAUGH-STEWAR, ELIZA W
Art Unit2881
Technology Center2800
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