Patent 11232924 - Method of operating a charged particle gun, charged particle gun, and charged particle beam device > Summary
US Patent
Patent No. US 11232924
Published on Jan 25, 2022
Application No. 17/075905
Filed on Oct 21, 2020
Priority Date -
Inventor/Applicants
Winkler, Dieter - Munich, DE
Classification
International:2
H01J 3/02
H01J 37/073;
Examiner
Raleigh, Donald L