In-situ plasma cleaning of process chamber components | Patent Number 11495434

US 11495434 B2
Application Number17034013
Publication NumberUS 20210013001 A1
Pendency2 years, 1 month, 11 days
Filled DateSep 28, 2020
Priority DateJun 12, 2015
Publication DateJan 14, 2021
Expiration DateJun 11, 2035
Inventor/ApplicantsRyan Downey
William Davis Lee
William M. Holber
Alexandre Likhanskii
Kevin Anglin
Peter Kurunczi
Jay T. Scheuer
ExaminesWILLIAMS, JOSEPH L
Art Unit2875
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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