Method and apparatus for non line-of-sight doping | Patent Number 11631588

US 11631588 B2
Application Number16739927
Publication NumberUS 20200152466 A1
Pendency3 years, 3 months, 9 days
Filled DateJan 10, 2020
Priority DateJun 1, 2018
Publication DateMay 14, 2020
Expiration DateMay 31, 2038
Inventor/ApplicantsChristopher R. Hatem
Dale K. Stone
Piero Sferlazzo
Roger Fish
ExaminesLE, TUNG X
Art Unit2844
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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