Automated wafer cleaning | Patent Number 11735440

US 11735440 B2
Application Number17736933
Publication NumberUS 20220262654 A1
Pendency1 year, 3 months, 20 days
Filled DateMay 4, 2022
Priority DateAug 17, 2018
Publication DateAug 18, 2022
Expiration DateAug 16, 2038
Inventor/ApplicantsChui-Ya Peng
Sen-Yeo PENG
Sen-Yeo Peng
Chun-Yu Lee
Chui-Ya PENG
Chun-Yu LEE
ExaminesCAMPBELL, NATASHA N.
Art Unit1714
Technology Center1700
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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