Pipe connection structure and processing apparatus | Patent Number 11774017

US 11774017 B2
Application Number17654281
Publication NumberUS 20220299137 A1
Pendency1 year, 6 months, 27 days
Filled DateMar 10, 2022
Priority DateMar 10, 2022
Publication DateSep 22, 2022
Expiration DateMar 9, 2042
Inventor/ApplicantsTakashi YOSHIDA
Takashi Yoshida
ExaminesCHOI, WILLIAM SOON
Art Unit3679
Technology Center3600
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
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