Plasma processing apparatus | Patent Number 11784030

US 11784030 B2
Application Number17932400
Publication NumberUS 20230005721 A1
Pendency1 year, 25 days
Filled DateSep 15, 2022
Priority DateJun 26, 2018
Publication DateJan 5, 2023
Expiration DateJun 25, 2038
Inventor/ApplicantsAtsushi Takeda
Masaharu Tanabe
Kazunari Sekiya
Atsushi TAKEDA
Kazunari SEKIYA
Nobuaki TSUCHIYA
Tadashi Inoue
Tadashi INOUE
Takayuki MORIWAKI
Masaharu TANABE
Hiroshi Sasamoto
Hiroshi SASAMOTO
Takayuki Moriwaki
Tatsunori SATO
Nobuaki Tsuchiya
Tatsunori Sato
ExaminesSATHIRAJU, SRINIVAS
Art Unit2844
Technology Center2800
Assignments
Canon Anelva Corporation
Current
Canon Anelva CorporationCanon Inc.
Original
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