Apparatus and method for handling wafer carrier doors | Patent Number 11784073

US 11784073 B2
Application Number17686278
Publication NumberUS 20220189792 A1
Pendency1 year, 7 months, 11 days
Filled DateMar 3, 2022
Priority DateAug 30, 2017
Publication DateJun 16, 2022
Expiration DateAug 29, 2037
Inventor/ApplicantsTsung-Sheng Kuo
Jiun-Rong Pai
Alan Yang
Vic Huang
Vic HUANG
Yang-Ann Chu
Hsu-Shui LIU
Jiun-Rong PAI
Yang-Ann CHU
Alan YANG
Tsung-Sheng KUO
Hsu-Shui Liu
ExaminesJOERGER, KAITLIN S
Art Unit3652
Technology Center3600
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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