Organotin oxide hydroxide patterning compositions, precursors, and patterning | Patent Number 11809081
US 11809081 B2Filled DateJun 6, 2022
Priority DateOct 13, 2015
Publication DateSep 22, 2022
Expiration DateOct 12, 2035
Inventor/ApplicantsJeremy T. Anderson
Kai Jiang
Joseph B. Edson
Alan J. Telecky
Brian J. Cardineau
Stephen T. Meyers
Douglas A. Keszler
Kai Jiang
Joseph B. Edson
Alan J. Telecky
Brian J. Cardineau
Stephen T. Meyers
Douglas A. Keszler
ExaminesCHU, JOHN S Y
Art Unit1737
Technology Center1700
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