Salt, acid generator, resist composition and method for producing resist pattern | Patent Number 11820736

US 11820736 B2
Application Number17718748
Publication NumberUS 20220348541 A1
Pendency1 year, 7 months, 13 days
Filled DateApr 12, 2022
Priority DateApr 12, 2022
Publication DateNov 3, 2022
Expiration DateApr 11, 2042
Inventor/ApplicantsKatsuhiro KOMURO
Koji ICHIKAWA
Katsuhiro Komuro
Koji Ichikawa
ExaminesTRAYWICK, ANDREW PRESTON
Art Unit1737
Technology Center1700
Assignments
Sumitomo Chemical
Current
Sumitomo Chemical
Original
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