Reticle storage pod and method for securing reticle | Patent Number 11822257

US 11822257 B2
Application Number17684879
Publication NumberUS 20220291596 A1
Pendency1 year, 8 months, 24 days
Filled DateMar 2, 2022
Priority DateMar 12, 2021
Publication DateSep 15, 2022
Expiration DateMar 11, 2041
Inventor/ApplicantsChia-Ho Chuang
Hsin-Min Hsueh
Hsing-Min Wen
Ming-Chien Chiu
ExaminesASFAW, MESFIN T
Art Unit2882
Technology Center2800
Assignments
Gudeng Precision Industrial Co. Ltd.
Current
Gudeng Precision Industrial Co. Ltd.
Original
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