Wafer stocker | Patent Number 11823934
US 11823934 B2Filled DateFeb 28, 2023
Priority DateNov 25, 2019
Publication DateJun 29, 2023
Expiration DateNov 24, 2039
Inventor/ApplicantsYasushi Taniyama
Toshihiro Kawai
Toshihiro Kawai
ExaminesMCCLAIN, GERALD
Art Unit3652
Technology Center3600
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