Wafer stocker | Patent Number 11823934

US 11823934 B2
Application Number18115044
Publication NumberUS 20230207367 A1
Pendency8 months, 26 days
Filled DateFeb 28, 2023
Priority DateNov 25, 2019
Publication DateJun 29, 2023
Expiration DateNov 24, 2039
Inventor/ApplicantsYasushi Taniyama
Toshihiro Kawai
ExaminesMCCLAIN, GERALD
Art Unit3652
Technology Center3600
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