Photolithography system including selective light array | Patent Number 11880139

US 11880139 B2
Application Number17482992
Publication NumberUS 20230092166 A1
Pendency2 years, 4 months, 2 days
Filled DateSep 23, 2021
Priority DateSep 23, 2021
Publication DateMar 23, 2023
Expiration DateSep 22, 2041
Inventor/ApplicantsBarbara Diane Young
Gregory Layton Lane, Jr.
Steven James Sedlock
Gregory Layton Lane, JR.
Kevin Christopher Ledden
ExaminesPERSAUD, DEORAM
Art Unit2882
Technology Center2800
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