Characterization of an electron beam | Patent Number 11892576

US 11892576 B2
Application Number18155314
Publication NumberUS 20230176239 A1
Pendency1 year, 20 days
Filled DateJan 17, 2023
Priority DateNov 12, 2020
Publication DateJun 8, 2023
Expiration DateNov 11, 2040
Inventor/ApplicantsPer TAKMAN
Ulf LUNDSTROM
Ulf Lundstrom
Tomi Tuohimaa
Per Takman
Tomi TUOHIMAA
ExaminesGAWORECKI, MARK R
Art Unit2884
Technology Center2800
Assignments
Excillum Ab
Current
Excillum Ab
Original
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