Vacuum wafer chuck for manufacturing semiconductor devices | Patent Number 11901215
US 11901215 B2Filled DateMay 4, 2022
Priority DateMay 8, 2020
Publication DateAug 18, 2022
Expiration DateMay 7, 2040
Inventor/ApplicantsChin-Shen Hsieh
Chung-Hsien Liao
Chung-Hsien Liao
ExaminesQUANN, ABBIE E
Art Unit3723
Technology Center3700
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