Rounded vertical wafer vessel rods | Patent Number 11908719

US 11908719 B2
Application Number17883597
Publication NumberUS 20220384224 A1
Pendency1 year, 6 months, 16 days
Filled DateAug 8, 2022
Priority DateJan 17, 2020
Publication DateDec 1, 2022
Expiration DateJan 16, 2040
Inventor/ApplicantsXin-Kai HUANG
Kuei-Hsiung Cho
Kuei-Hsiung CHO
Ching-Wen Cheng
Xin-Kai Huang
Ching-Wen CHENG
ExaminesKEBEDE, BROOK
Art Unit2894
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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