Method and system for scanning MEMS cantilevers | Patent Number 11912566

US 11912566 B2
Application Number18138454
Publication NumberUS 20230264948 A1
Pendency10 months, 9 days
Filled DateApr 24, 2023
Priority DateMay 22, 2020
Publication DateAug 24, 2023
Expiration DateMay 21, 2040
Inventor/ApplicantsSteven Alexander-Boyd Hickman
Charles David Melville
Sarah Colline McQuaide
Brian T. Schowengerdt
Abhijith Rajiv
ExaminesABDELAZIEZ, YASSER A
Art Unit2898
Technology Center2800
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