Inspection apparatus and inspection method | Patent Number 11921059

US 11921059 B2
Application Number18350093
Publication NumberUS 20230349844 A1
Pendency7 months, 28 days
Filled DateJul 11, 2023
Priority DateNov 29, 2022
Publication DateNov 2, 2023
Expiration DateNov 28, 2042
Inventor/ApplicantsTakeo TSUKAMOTO
Takeo Tsukamoto
ExaminesARTMAN, THOMAS R
Art Unit2884
Technology Center2800
Assignments
Canon Anelva Corporation
Current
Canon Anelva CorporationCanon Inc.
Original
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