Methods for conditioning a processing reactor | Patent Number 11926892

US 11926892 B2
Application Number17836889
Publication NumberUS 20220367239 A1
Pendency1 year, 9 months, 7 days
Filled DateJun 9, 2022
Priority DateMay 13, 2021
Publication DateNov 17, 2022
Expiration DateMay 12, 2041
Inventor/ApplicantsGang Wang
ExaminesLU, JIONG-PING
Art Unit1713
Technology Center1700
Assignments
Globalwafers Co. Ltd.
Current
Globalwafers Co. Ltd.
Original
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