Methods to reduce material surface roughness | Patent Number 11939674

US 11939674 B2
Application Number18116609
Publication NumberUS 20230203652 A1
Pendency1 year, 25 days
Filled DateMar 2, 2023
Priority DateNov 8, 2019
Publication DateJun 29, 2023
Expiration DateNov 7, 2039
Inventor/ApplicantsDiwakar Kedlaya
Karthik Janakiraman
Aykut Aydin
Yi Yang
Krishna Nittala
ExaminesCHEN, BRET P
Art Unit1715
Technology Center1700
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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