Method and apparatus for controlling spatial distribution of RF power and plasma density | Patent Publication Number 20050031796

US 20050031796 A1
Patent Number-
Application Number10636154
Filled DateAug 7, 2003
Priority DateAug 7, 2003
Publication DateFeb 10, 2005
Inventor/ApplicantsBing-Hung Chen
Sunny Wu
Ping-Hsu Chen
Chih-Tien Chang
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