Device and method to create a low divergence, high power laser beam for material processing applications | Patent Publication Number 20070280311
US 20070280311 A1Patent NumberUS 08803027 B2
Application Number11805596
Filled DateMay 23, 2007
Priority DateJun 5, 2006
Publication DateDec 6, 2007
Original AssigneeCymer Inc.
Current AssigneeCymer Inc.
Inventor/ApplicantsThomas Hofmann
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