Multiple millisecond anneals for semiconductor device fabrication | Patent Publication Number 20080299750

US 20080299750 A1
Patent NumberUS 07846803 B2
Application Number11756197
Filled DateMay 31, 2007
Priority DateMay 31, 2007
Publication DateDec 4, 2008
Original AssigneeNxp Semiconductors
Inventor/ApplicantsVishal P. Trivedi
Gregory S. Spencer
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