Multiple millisecond anneals for semiconductor device fabrication | Patent Publication Number 20080299750
US 20080299750 A1Patent NumberUS 07846803 B2
Application Number11756197
Filled DateMay 31, 2007
Priority DateMay 31, 2007
Publication DateDec 4, 2008
Original AssigneeNxp Semiconductors
Current AssigneeMorgan Stanley Senior Funding Inc.
Inventor/ApplicantsVishal P. Trivedi
Gregory S. Spencer
Gregory S. Spencer
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