Scanned laser light source | Patent Publication Number 20120205347

US 20120205347 A1
Patent NumberUS 08829393 B2
Application Number13442128
Filled DateApr 9, 2012
Priority DateApr 18, 2002
Publication DateAug 16, 2012
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Inc.
Inventor/ApplicantsDean C. Jennings
Vernon Behrens
Abhilash J. Mayur
Mark Yam
Paul A. O'Brien
Alexander Goldin
Leonid M. Tertitski
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